SanDLab

MEMS and Microsensors 2023-2024 Professor: Giacomo Langfelder Laboratory Assistants: Riccardo Nastri, Christian Padovani, Andrea Buffoli The aim of the course is to introduce the basic concepts of various types of electronic devices which allow to acquire physical, chemical and biological information from the outside world and also to act on it at microscopic level. The attention is focused on the operating principles of (CMOS) optical image sensors and of Micro-Electro-Mechanical-Systems (MEMS). Their integration in more complex systems and with their electronics is also considered. The performances of these devices are discussed with particular reference to their various societal fields of application. Class-works about specific case-studies as well as experimental CAD laboratory activities are foreseen. Dedicated classes to relate the course matter to the ONU Agenda 2030 will be also presented. News and Communications ----------------------------------------- Welcome folks, in this page you will find the links to the videos, the slides of the lectures, and the detailed and discussed solutions of numerical exercise and CAD classes! More information on the organization of the course can be found here! All the slides and videos are made available well in advance with respect to the corresponding class date. The numerical exercises solutions are uploaded right after the corresponding classes. The most updated course schedule is always available here! Helpful slides, reviewing basics of electronics for non-electronic students, and focusing on the purpose of the course, have been added! Check further below on this page! Slides (and link to Videos) of the course ------------------------------------------------------------------------------------------ C01 Course Introduction (link to video) C02 MEMS Technology (link to video) C03 MEMS Spring Mass Damper (link to video) C04 MEMS Accelerometer Part 1 (link to video) C05 MEMS Accelerometer Part 2 (link to video) C06 MEMS Accelerometer Part 3 (link to video) C07 MEMS Accelerometer Part 4 (link to video) C08 MEMS Resonator Part 1 (link to video) C09 MEMS Resonator Part 2 (link to video) C10 MEMS Resonator Part 3 (link to video) C11 MEMS Gyroscope Part 1 (link to video) C12 MEMS Gyroscope Part 2 (link to video) C13 MEMS Gyroscope Part 3 (link to video) C14 MEMS Gyroscope Part 4 (link to video) C15 MEMS Gyroscope Part 5 (link to video) C16 MEMS Gyroscope Part 6 (link to video) C17 MEMS Magnetometer Part 1 (link to video) C18 MEMS Magnetometer Part 2 (link to video) C19 MEMS Magnetometer Part 3 (link to video) C20 MEMS Characterization (link to video) C21 CMOS Sensors Basics Part 1 (link to video) C22 CMOS Sensors Basics Part 2 (link to video) C23 CMOS APS3T Part 1 (link to video) C24 CMOS APS3T Part 2 (link to video) C25 CMOS APS3T Part 3 (link to video) C26 CMOS APS4T Part 1 (link to video) C27 CMOS APS4T Part 2 (link to video) C28 United Nations Goals and Microsensors Exercises and links to Webex recorded solutions ------------------------------------------------------------------------ E01 Accelerometer Design (link to video) E02 Accelerometer Readout (link to video) E03 Torsional Accelerometer (link to video) E04 CAD MEMS Capacitance simulation (link to video) E05 Tang resonator (link to video) E06 MEMS-based oscillator (link to video) E07 MEMS gyroscope electromechanical design (link to video) E08 CAD MEMS in-plane Accelerometer (link to video) E09 MEMS gyroscope drive loop (link to video) E10 CAD MEMS torsional Accelerometer (link to video) E11 CAD MEMS yaw Gyroscope (link to video) E12 CAD MEMS pitch/roll gyroscope (link to video) E13 MEMS gyroscope sense chain and noise (link to video) E14 MEMS microphone design (link to video) E15 CAD photodiode (link to video) E16 Photon flux and pixel photocurrent (link to video) E17 Signal to Noise ratio in a CMOS pixel (link to video) E18 Dynamic range in CMOS image sensors (link to video) E19 Photon Transfer Curve (link to video) E20 CAD Pinned photodiode (link to video) Review of basic electronics (focused for non-electronic students) --------------------------------------------------------------------------------------------------- B01 photodiodes B02 MOS noise B03 eln basics Seminars --------------------------------------------------------------------------------------------------- S01 P. Fedeli (ST): "ThELMA-Double: a novel technology for 3D development of MEMS IMU" S02 V. Avantagiati, C. Marra (TDK): "System Design in MEMS Gyroscopes: from mechanics to digital" S03 L. Gaffuri Pagani, F. Sechi (BOSCH): "Consumer Inertial MEMS – High Tech in Your Hands" Exams Text and Solution (use them for practice during exam preparation) --------------------------------------------------------------------------------------------------------------- Note: there may be unavoidable minor errors in the solutions of the exams below. If you find them, please send to Professors a warning, which will be very appreciated. 03/02/2016 - Text and Solution 17/02/2016 - Text and Solution 11/07/2016 - Text and Solution 13/09/2016 - Text and Solution 27/09/2016 - Text and Solution 30/01/2017 - Text and Solution 16/02/2017 - Text and Solution 03/07/2017 - Text and Solution 18/07/2017 - Text and Solution 08/09/2017 - Text and Solution 31/01/2018 - Text and Solution 21/02/2018 - Text and Solution 28/06/2018 - Text and Solution 13/07/2018 - Text and Solution 09/03/2018 - Text and Solution 09/01/2019 - Text and Solution 31/01/2019 - Text and Solution 26/06/2019 - Text and Solution 19/07/2019 - Text and Solution 02/09/2019 - Text and Solution 24/01/2020 - Text and Solution 20/02/2020 - Text and Solution 11/06/2020 - Text and Solution 06/07/2020 - Text and Solution 10/09/2020 - Text and Solution 21/12/2020 - Text and Solution 26/01/2021 - Text and Solution 17/02/2021 - Text and Solution 26/06/2021 - Text and Solution 13/07/2021 - Text and Solution 22/12/2021 - Text and Solution 17/01/2022 - Text and Solution 14/02/2022 - Text and Solution 21/06/2022 - Text and Solution 05/09/2022 - Text and Solution 21/12/2022 - Text and Solution 13/01/2023 - Text and Solution 06/02/2023 - Text and Solution 22/12/2023 - Text and Solution 11/01/2024 - Text and Solution 01/02/2024 - Text and Solution MATLAB Scripts ------------------------ MATLAB routine #1 for sample Root Allan Variance visualization with different white noise, 1/f noise and offset drift. Enjoy... MATLAB routine #2 for sample Photon Transfer Curve visualization as a function of different active pixel parameters. Enjoy... Comsol Files --------------------- Comsol file #1 for Cad exercise on Capacitors Comsol file #2 for Cad exercise on Accelerometers Comsol file #3 for Cad exercise on Torsional Accelerometers Comsol file #4 for Cad exercise on Yaw Gyroscopes Comsol file #5 for Cad exercise on Gyroscopes Comsol file #6 for CAD exercise on Photodiodes Comsol file #7 for CAD exercise on Pinned Diodes Interesting tutorial on gyroscope design from the Comsol website https://www.comsol.it/model/a-micromachined-comb-drive-tuning-fork-rate-gyroscope-88781


Other Courses

Optoelectronic Systems and Digital Imaging Professor: Giacomo Langfelder Teaching Assistant: Paolo Minotti The course covers the operation of some optoelectronic systems of general interest, starting from the characteristics of components and from the needs of the applications, in order to make the student is able to choose the most appropriate solutions, knowing the limits of use and performance theoretically achievable, and to design simple systems. Topics: 1) Systems for capturing digital images and resolution limits of optics and sensor. CCD and CMOS sensors; electronic signal reading; S / N ratio; dynamic range. Acquisition of color images. 2) Systems for the representation of colour images: LCD displays. Gamut. Backlight. 3) Systems for colour measurement: colour spaces and colour representation. Colorimeters and spectrophotometers. 4) Measurement of infrared signals: sensors. Applications to imaging and temperature measurement. Slides of the course: 00 Introduction 01 Human Vision 02 Light Sources 03 Geometric Optics 04 Aberration Diffraction 05 FOV and DOF 06 Resolution MTF 07 Sensor MTF 08 Sensor Introduction 09 Active Pixel 10 HDR 11 4T and CDS 12 Color Acquisition 13 CFA and Demosaicking 14 System Noise 15 TFD 16 XYZ Color Space 17 Perceptual Color Spaces 18 Color Conversion 19 White Balance 20 Color Errors 21 Multispectral Imaging 22 Digital Imaging Simulations 23 Image Representation 24 Display Technologies 25 Vis+NIR Acquisition 26 Infrared Temperature Measurement 27 Auxiliary Subsystems Exercises: E01 Photodiodes Review E02 Evaluation of the number of photons impinging on a camera pixel, starting from a generic scene E03 Photography at known distances of known objects: choice of the camera parameters E04 MOS and Noise Review E05 Signal-to-Noise Ratio of a 3T APS for digital cameras E06 Dynamic Range, choice of the ADC, maximum SNR of a 3T APS E07 Timing issues in CMOS image sensors: maximum readout speed and rolling shutter readout E08 Circuits for Correlated Double Sampling E09 Photon Transfer E10 Layered-junction sensor E11 White Balance E12 Color Instruments E13 Summary Exercises E14 Liquid-Cristal Display E15 Image Sensor Design E16 Temperature Monitoring E17 Summary Exercises Sample Exam Exams: 29/06/2015 14/07/2015 07/09/2015 21/09/2015

MEMS and Microsensors 2023-2024

Other Courses

Optoelectronic Systems and Digital Imaging