MEMS and Microsensors 20232024
Professor: Giacomo
Langfelder
Laboratory Assistants: Riccardo Nastri, Christian Padovani, Andrea Buffoli
The aim of the course is to introduce the basic concepts of various
types
of electronic devices which allow to acquire physical, chemical and
biological information from the outside world and also to act on it at
microscopic level. The attention is focused on the operating
principles of
(CMOS) optical image sensors and of MicroElectroMechanicalSystems
(MEMS).
Their integration in more complex systems and with their electronics is
also considered. The
performances of these devices are discussed with particular reference
to their various societal fields of application. Classworks about
specific
casestudies as well as experimental CAD laboratory activities are
foreseen. Dedicated classes to relate the course matter to the ONU
Agenda 2030 will be also presented.
News and Communications  Welcome
folks, in this page you will find the links to the videos, the slides
of the lectures, and the detailed and discussed solutions of numerical
exercise and CAD classes! More information on the organization of the course can be
found here!
All
the
slides and videos are made available well in advance with respect to
the corresponding class date. The numerical exercises solutions
are uploaded right after the corresponding classes.
The most updated course
schedule is always available here!
Helpful
slides, reviewing basics of electronics for nonelectronic students,
and focusing on the purpose of the course, have been added! Check
further below on this page!
Slides (and link to Videos) of the course 
C01 Course Introduction (link to video)
C02 MEMS Technology (link to video) C03 MEMS Spring Mass Damper (link to video) C04 MEMS Accelerometer Part 1 (link to video) C05 MEMS Accelerometer Part 2 (link to video) C06 MEMS Accelerometer Part 3 (link to video) C07 MEMS Accelerometer Part 4 (link to video) C08 MEMS Resonator Part 1 (link to video) C09 MEMS Resonator Part 2 (link to video) C10 MEMS Resonator Part 3 (link to video) C11 MEMS Gyroscope Part 1 (link to video) C12 MEMS Gyroscope Part 2 (link to video) C13 MEMS Gyroscope Part 3 (link to video) C14 MEMS Gyroscope Part 4 (link to video) C15 MEMS Gyroscope Part 5 (link to video) C16 MEMS Gyroscope Part 6 (link to video) C17 MEMS Magnetometer Part 1 (link to video) C18 MEMS Magnetometer Part 2 (link to video) C19 MEMS Magnetometer Part 3 (link to video) C20 MEMS Characterization (link to video)
C21 CMOS Sensors Basics Part 1 (link to video) C22 CMOS Sensors Basics Part 2 (link to video) C23 CMOS APS3T Part 1 (link to video) C24 CMOS APS3T Part 2 (link to video) C25 CMOS APS3T Part 3 (link to video) C26 CMOS APS4T Part 1 (link to video) C27 CMOS APS4T Part 2 (link to video)
C28 United Nations Goals and Microsensors
Exercises and links to Webex recorded solutions  E01 Accelerometer Design (link to video) E02 Accelerometer Readout (link to video) E03 Torsional Accelerometer (link to video)
E04 CAD MEMS Capacitance simulation (link to video) E05 Tang resonator (link to video) E06 MEMSbased oscillator (link to video) E07 MEMS gyroscope electromechanical design (link to video)
E08 CAD MEMS inplane Accelerometer (link to video) E09 MEMS gyroscope drive loop (link to video)
E10 CAD MEMS torsional Accelerometer (link to video) E11 CAD MEMS yaw Gyroscope (link to video) E12 CAD MEMS pitch/roll gyroscope (link to video) E13 MEMS gyroscope sense chain and noise (link to video) E14 MEMS microphone design (link to video) E15 CAD photodiode (link to video) E16 Photon flux and pixel photocurrent (link to video) E17 Signal to Noise ratio in a CMOS pixel (link to video) E18 Dynamic range in CMOS image sensors (link to video)
E19 Photon Transfer Curve (link to video)
E20 CAD Pinned photodiode (link to video)
Review of basic electronics (focused for nonelectronic students)  B01 photodiodes B02 MOS noise B03 eln basics
Seminars

S01 P. Fedeli (ST): "ThELMADouble: a novel technology for 3D development of MEMS IMU"
S02 V. Avantagiati, C. Marra (TDK): "System Design in MEMS Gyroscopes: from mechanics to digital"
S03 L. Gaffuri Pagani, F. Sechi (BOSCH): "Consumer Inertial MEMS â€“ High Tech in Your Hands"
Exams Text
and Solution (use them for practice during exam preparation)
 Note:
there may be unavoidable minor errors in the solutions of the exams
below. If you find them, please send to Professors a warning, which
will be very appreciated.
03/02/2016  Text and Solution
17/02/2016  Text and Solution
11/07/2016  Text and Solution
13/09/2016  Text and Solution
27/09/2016  Text and Solution 30/01/2017  Text and Solution 16/02/2017  Text and Solution 03/07/2017  Text and Solution 18/07/2017  Text and Solution 08/09/2017  Text and Solution 31/01/2018  Text and Solution 21/02/2018  Text and Solution 28/06/2018  Text and Solution 13/07/2018  Text and Solution 09/03/2018  Text and Solution 09/01/2019  Text and Solution 31/01/2019  Text and Solution 26/06/2019  Text and Solution 19/07/2019  Text and Solution 02/09/2019  Text and Solution 24/01/2020  Text and Solution 20/02/2020  Text and Solution 11/06/2020  Text and Solution 06/07/2020  Text and Solution 10/09/2020  Text and Solution 21/12/2020  Text and Solution
26/01/2021  Text and Solution 17/02/2021  Text and Solution 26/06/2021  Text and Solution 13/07/2021  Text and Solution 22/12/2021  Text and Solution 17/01/2022  Text and Solution 14/02/2022  Text and Solution 21/06/2022  Text and Solution
05/09/2022  Text and Solution 21/12/2022  Text and Solution
13/01/2023  Text and Solution
06/02/2023  Text and Solution
22/12/2023  Text and Solution
11/01/2024  Text and Solution
01/02/2024  Text and Solution
MATLAB
Scripts

MATLAB routine #1 for
sample Root Allan Variance visualization with different white noise,
1/f noise and offset drift. Enjoy... MATLAB routine #2 for
sample Photon Transfer Curve visualization as a function of different active pixel parameters. Enjoy...
Comsol Files

Comsol file #1 for Cad exercise on Capacitors Comsol file #2 for Cad exercise on Accelerometers Comsol file #3 for Cad exercise on Torsional Accelerometers Comsol file #4 for Cad exercise on Yaw Gyroscopes Comsol file #5 for Cad exercise on Gyroscopes Comsol file #6 for CAD exercise on Photodiodes Comsol file #7 for CAD exercise on Pinned Diodes
Interesting tutorial on gyroscope design from the Comsol website https://www.comsol.it/model/amicromachinedcombdrivetuningforkrategyroscope88781

