SandLab Publications List

  

Journal Articles and International Conference Proceedings

Leoncini, M., Bestetti, M., Bonfanti, A., Facchinetti, S., Minotti, P., Langfelder, G.
Fully Integrated, 406 mu$A, 5/hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope
(2019) IEEE Transactions on Industrial Electronics, 66 (9), art. no. 8536879, pp. 7386-7396.

Zega, V., Langfelder, G., Falorni, L.G., Comi, C.
Hardening, softening, and linear behavior of elastic beams in MEMS: An analytical approach
(2019) Journal of Microelectromechanical Systems, 28 (2), art. no. 8621601, pp. 189-198.

Gadola, M., Malvicini, M., Langfelder, G., Colin, M., Robert, P.
Improving the stability of 1.5 mm2 gyroscopes down to 2°/hr at 1000 s with NEMS based sensing
(2019) INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems,
Proceedings, art. no. 8739450, .

Bestetti, M., Leoncini, M., Minotti, P., Marra, C.R., Langfelder, G., Tocchio, A., Facchinetti, S.
Low-Power Frequency-to-Digital-Converter for a 6-Axis MEMS Frequency-Modulated Inertial
Measurement Unit
(2019) INERTIAL 2019 - 6th IEEE International Symposium on Inertial Sensors and Systems,
Proceedings, art. no. 8739760, .

Marra, C.R., Tocchio, A., Rizzini, F., Langfelder, G.
Solving FSR Versus Offset-Drift Trade-Offs with Three-Axis Time-Switched FM MEMS Accelerometer
(2018) Journal of Microelectromechanical Systems, 27 (5), art. no. 8409274, pp. 790-799.

Marra, C.R., Gadola, M., Laghi, G., Gattere, G., Langfelder, G.
Monolithic 3-Axis MEMS Multi-Loop Magnetometer: A Performance Analysis
(2018) Journal of Microelectromechanical Systems, 27 (4), art. no. 8391756, pp. 748-758.

Marra, C.R., Ruggieri, A.M., Minotti, P., Mussi, G., Bonfanti, A.G., Lacaita, A.L., Langfelder, G.
Optimization of low-power oscillator topology for frequency modulated MEMS inertial sensors
(2018) 2018 European Frequency and Time Forum, EFTF 2018, pp. 122-125.

Zega, V., Comi, C., Minotti, P., Langfelder, G., Falorni, L., Corigliano, A.
A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective
(2018) European Journal of Mechanics, A/Solids, 70, pp. 203-212.

Minotti, P., Dellea, S., Mussi, G., Bonfanti, A., Facchinetti, S., Tocchio, A., Zega, V., Comi, C.,
Lacaita, A.L., Langfelder, G.
High Scale-Factor Stability Frequency-Modulated MEMS Gyroscope: 3-Axis Sensor and Integrated
Electronics Design
(2018) IEEE Transactions on Industrial Electronics, 65 (6), art. no. 8106693, pp. 5040-5050.

Zega, V., Credi, C., Invernizzi, M., Bernasconi, R., Langfelder, G., Cigada, A., Magagnin, L., Levi,
M., Corigliano, A.
3D-printing and wet metallization for uniaxial and multi-axial accelerometers
(2018) 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and
Experiments in Microelectronics and Microsystems, EuroSimE 2018, pp. 1-4.

Tocchio, A., Rizzini, F., Marra, C.R., Ferrari, F.M., Langfelder, G.
Electro-mechanical chopping & modulation of acceleration: The geometry-modulated accelerometer
(2018) 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings,
pp. 1-4.

Maspero, F., López-Rey, V.F., Joet, L., Hentz, S., Langfelder, G.
Combined electronics and algorithm development for offset drift characterization in MEMS
accelerometers
(2018) 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018
 Proceedings, pp. 1-4.

Marra, C.R., Ferrari, F.M., Langfelder, G., Tocchio, A., Rizzini, F.
Single resonator, time-switched, low offset drift z-axis FM MEMS accelerometer
(2018) 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018
Proceedings, pp. 1-4.

Minotti, P., Mussi, G., Langfelder, G., Zega, V., Facchinetti, S., Tocchio, A.
A system-level comparison of amplitude-vs frequency-modulation approaches exploited in low-power
MEMS vibratory gyroscopes
(2018) 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 -
Proceedings, pp. 1-4.

Zega, V., Comi, C., Fedeli, P., Frangi, A., Corigliano, A., Minotti, P., Langfelder, G., Falorni, L.,
Tocchio, A.
A dual-mass frequency-modulated (FM) pitch gyroscope: Mechanical design and modelling
(2018) 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 -
Proceedings, pp. 1-4.

Frangi, A., Fedeli, P., Langfelder, G., Chiesa, A., Gattere, G.
Fluid damping modeling for MEMS sensors operating in the 10 kHz-100 kHz range in near vacuum
(2018) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018-January, pp. 972-975.

Maspero, F., Delachanal, S., Berthelot, A., Joet, L., Langfelder, G., Hentz, S.
Small footprint, high-performance silicon capacitive accelerometer with a 3-D process
(2018) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018-January, pp. 109-112.

Marra, C.R., Ferrari, F.M., Karman, S., Tocchio, A., Rizzini, F., Langfelder, G.
Single-resonator, time-switched FM MEMS accelerometer with theoretical offset drift complete
cancellation
(2018) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018-January, pp. 117-120.

Mussi, G., Bestetti, M., Zega, V., Frangi, A., Gattere, G., Langfelder, G.
Resonators for real-time clocks based on epitaxial polysilicon process: A feasibility study on
system-level compensation of temperature drifts
(2018) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018-January, pp. 711-714.

Marra, C.R., Laghi, G., Gadola, M., Gattere, G., Paci, D., Tocchio, A., Langfelder, G.
100 nT/√Hz, 0.5 mm2 monolithic, multi-loop low-power 3-axis MEMS magnetometer
(2018) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2018-January, pp. 101-104.

Minotti, P., Pagani, G.L., Aresi, N., Langfelder, G.
MEMS Emulator: A Tool for Development and Testing of Electronics for Microelectromechanical Systems
(2018) Journal of Microelectromechanical Systems, 27 (2), pp. 321-332.

Langfelder, G., Tocchio, A.
Microelectromechanical systems integrating motion and displacement sensors
(2018) Smart Sensors and MEMS: Intelligent Sensing Devices and Microsystems for Industrial
Applications: Second Edition, pp. 395-428.

Zega, V., Credi, C., Bernasconi, R., Langfelder, G., Magagnin, L., Levi, M., Corigliano, A.
The first 3-d-printed z-axis accelerometers with differential capacitive sensing
(2018) IEEE Sensors Journal, 18 (1), pp. 53-60.

Giacci, F., Dellea, S., Langfelder, G.
Signal integrity in capacitive and piezoresistive single- and multi-axis MEMS gyroscopes under
vibrations
(2017) Microelectronics Reliability, 75, pp. 59-68.

Fedeli, P., Frangi, A., Laghi, G., Langfelder, G., Gattere, G.
Near Vacuum Gas Damping in MEMS: Simplified Modeling
(2017) Journal of Microelectromechanical Systems, 26 (3), art. no. 7896546, pp. 632-642.

Pagani, L.G., Langfelder, G., Minotti, P., Aresi, N.
A programmable emulator of MEMS inertial sensors
(2017) 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings,
art. no. 7935694, pp. 142-143.

Dellea, S., Longoni, A., Langfelder, G., Nikas, A., Leman, O., Hauer, J., Mantini, G., Naschberger,
R., Rey, P.
A comprehensive study of NEMS-based piezoresistive gyroscopes for vestibular implant systems
(2017) 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings,
art. no. 7935665, pp. 1-4.

Minotti, P., Mussi, G., Dellea, S., Bonfanti, A., Lacaita, A.L., Langfelder, G., Zega, V., Comi, C.,
Facchinetti, S., Tocchio, A.
A 160 μa, 8 mdps/√Hz frequency-modulated MEMS yaw gyroscope
(2017) 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 -
 Proceedings, art. no. 7935676, pp. 1-4.

Dellea, S., Strazzeri, G.S., Rey, P., Langfelder, G.
Ultra-low-voltage gyroscopes based on piezoresistive NEMS for drive-motion and coriolis-motion
sensing
(2017) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
art. no. 7863329, pp. 21-24.

Zega, V., Comi, C., Minotti, P., Falorni, L., Tocchio, A., Langfelder, G., Corigliano, A.
Mechanical design of a fully-differential triaxial frequency modulated mems gyroscope
(2017) AIMETA 2017 - Proceedings of the 23rd Conference of the Italian Association of Theoretical
and Applied Mechanics, 4, pp. 420-427.

Frangi, A., Fedeli, P., Laghi, G., Langfelder, G., Gattere, G.
Near Vacuum Gas Damping in MEMS: Numerical Modeling and Experimental Validation
(2016) Journal of Microelectromechanical Systems, 25 (5), art. no. 7508460, pp. 890-899.

Laghi, G., Marra, C.R., Minotti, P., Tocchio, A., Langfelder, G.
A 3-D micromechanical multi-loop magnetometer driven off-resonance by an on-chip resonator
(2016) Journal of Microelectromechanical Systems, 25 (4), art. no. 7470587, pp. 637-651.

Langfelder, G., Vandi, M., Aresi, N., Frizzi, T.
Fast and reliable closed-loop wafer-level measurement of gyroscopes drive quality factor
(2016) IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings, art.
no. 7435561, pp. 119-120.

Dellea, S., Giacci, F., Longoni, A.F., Langfelder, G., Rey, P., Robert, P.
Analysis of gyrocompassing through miniaturized MEMS based on piezoresistive sensing
(2016) IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings, art.
no. 7435536, pp. 25-28.

Laghi, G., Frangi, A.A., Fedeli, P., Gattere, G., Langfelder, G.
Comprehensive modelling and experimental verification of air damping coefficients in MEMS of
complex geometry
(2016) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2016-February, art. no. 7421791, pp. 958-961.

Dellea, S., Rizzini, F., Tocchio, A., Ardito, R., Langfelder, G.
Experimental study of out-of-plane adhesion force evolution (and regression) for MEMS accelerometers
(2016) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2016-February, art. no. 7421803, pp. 1006-1009.

Giacci, F., Bianchi, A., Dellea, S., Longoni, A.F., Langfelder, G.
Amplitude motion stabilization in drive resonators limited by an automatic feather contact mechanism
(2016) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2016-February, art. no. 7421566, pp. 95-98.

Dellea, S., Giacci, F., Rey, P., Capodici, A., Langfelder, G.
Reliability of gyroscopes based on piezoresistive nano-gauges against shock and free-drop tests
(2016) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2016-February, art. no. 7421608, pp. 255-258.

Comi, C., Corigliano, A., Langfelder, G., Zega, V., Zerbini, S.
Sensitivity and temperature behavior of a novel z-axis differential resonant micro accelerometer
(2016) Journal of Micromechanics and Microengineering, 26 (3), art. no. 035006, .

Dellea, S., Ardito, R., De Masi, B., Tocchio, A., Rizzini, F., Langfelder, G.
Sidewall Adhesion Evolution in Epitaxial Polysilicon as a Function of Impact Kinetic Energy and
Stopper Area
(2016) Journal of Microelectromechanical Systems, 25 (1), art. no. 7307100, pp. 134-143.

Comi, C., Corigliano, A., Doti, M., Garatti, A., Langfelder, G., Zega, V.
Torsional Microresonator in the Nonlinear Regime: Experimental, Numerical and Analytical
Characterization
(2016) Procedia Engineering, 168, pp. 933-936.

Dellea, S., Giacci, F., Longoni, A.F., Langfelder, G.
In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection
(2015) Journal of Microelectromechanical Systems, 24 (6), art. no. 7124414, pp. 1817-1826.

Minotti, P., Brenna, S., Laghi, G., Bonfanti, A.G., Langfelder, G., Lacaita, A.L.
A Sub-400-nT/√Hz, 775-μW, Multi-Loop MEMS Magnetometer With Integrated Readout Electronics
(2015) Journal of Microelectromechanical Systems, 24 (6), art. no. 7163502, pp. 1938-1950.

Giacci, F., Dellea, S., Longoni, A.F., Langfelder, G.
Vibrations rejection in gyroscopes based on piezoresistive nanogauges
(2015) 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and
Microsystems, TRANSDUCERS 2015, art. no. 7181039, pp. 780-783.

Laghi, G., Longoni, A.F., Minotti, P., Tocchio, A., Langfelder, G.
100 μa, 320 nT/vHz, 3-AXIS Lorentz force MEMS magnetometer
(2015) 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and
Microsystems, TRANSDUCERS 2015, art. no. 7181045, pp. 803-806.

Spinelli, A.S., Minotti, P., Laghi, G., Langfelder, G., Lacaita, A.L., Paci, D.
Simple model for the performance of realistic AMR magnetic field sensors
(2015) 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and
Microsystems, TRANSDUCERS 2015, art. no. 7181398, pp. 2204-2207.

Dellea, S., Langfelder, G., Longoni, A.F.
Fatigue in Nanometric Single-Crystal Silicon Layers and Beams
(2015) Journal of Microelectromechanical Systems, 24 (4), art. no. 6898815, pp. 822-830.

Frangi, A., Laghi, G., Langfelder, G., Minotti, P., Zerbini, S.
Optimization of Sensing Stators in Capacitive MEMS Operating at Resonance
(2015) Journal of Microelectromechanical Systems, 24 (4), art. no. 7000521, pp. 1077-1084.

Laghi, G., Dellea, S., Longoni, A., Minotti, P., Tocchio, A., Zerbini, S., Langfelder, G.
Torsional MEMS magnetometer operated off-resonance for in-plane magnetic field detection
(2015) Sensors and Actuators, A: Physical, 229, pp. 218-226.

Langfelder, G., Dellea, S., Berthelot, A., Rey, P., Tocchio, A., Longoni, A.F.
Analysis of mode-split operation in MEMS based on piezoresistive nanogauges
(2015) Journal of Microelectromechanical Systems, 24 (1), art. no. 6832453, pp. 174-181.

Giacci, F., Dellea, S., Langfelder, G.
Capacitive vs piezoresistive MEMS gyroscopes: A theoretical and experimental noise comparison
(2015) Procedia Engineering, 120, pp. 406-409.

Frangi, A., Laghi, G., Minotti, P., Langfelder, G.
Effect of stators geometry on the resonance sensitivity of capacitive MEMS
(2015) Procedia Engineering, 120, pp. 294-297.

Dellea, S., Giacci, F., Longoni, A., Rey, P., Berthelot, A., Langfelder, G.
Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale
piezoresistors
(2015) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2015-February (February), art. no. 7050880, pp. 37-40.

Dellea, S., Ardito, R., De Masi, B., Rizzini, F., Tocchio, A., Langfelder, G.
A study of adhesion forces in thick epitaxial polysilicon under dynamic impact loading
(2015) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2015-February (February), art. no. 7051092, pp. 849-852.

Brenna, S., Minotti, P., Bonfanti, A., Laghi, G., Langfelder, G., Longoni, A., Lacaita, A.L.
A low-noise sub-500μW lorentz force based integrated magnetic field sensing system
(2015) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
2015-February (February), art. no. 7051113, pp. 932-935.

Langfelder, G., Laghi, G., Minotti, P., Tocchio, A., Longoni, A.
Off-resonance low-pressure operation of lorentz force MEMS magnetometers
(2014) IEEE Transactions on Industrial Electronics, 61 (12), art. no. 6797939, pp. 7124-7130.

Caspani, A., Comi, C., Corigliano, A., Langfelder, G., Zega, V., Zerbini, S.
Dynamic nonlinear behavior of torsional resonators in MEMS
(2014) Journal of Micromechanics and Microengineering, 24 (9), art. no. 095025, .

Martínez, M.A., Valero, E.M., Hernández-Andrés, J., Romero, J., Langfelder, G.
Combining transverse field detectors and color filter arrays to improve multispectral imaging systems
(2014) Applied Optics, (13), pp. C14-C24.

Langfelder, G., Tocchio, A.
Operation of Lorentz-force MEMS magnetometers with a frequency offset between driving current
and mechanical resonance
(2014) IEEE Transactions on Magnetics, 50 (1), art. no. 2281404, .

Langfelder, G., Caspani, A., Tocchio, A.
Design criteria of low-power oscillators for consumer-grade MEMS resonant sensors
(2014) IEEE Transactions on Industrial Electronics, 61 (1), art. no. 6461406, pp. 567-574.

Langfelder, G., Dellea, S., Aresi, N., Longoni, A.
Linearity of piezoresistive nano-gauges for MEMS sensors
(2014) Procedia Engineering, 87, pp. 1469-1472.

Caspani, A., Langfelder, G., Longoni, A., Linari, E., Tommolini, V.
Analysis of a 64×64 matrix of direct color sensors based on spectrally tunable pixels
(2014) Proceedings of SPIE - The International Society for Optical Engineering, 9023, art. no. 90230O.

Langfelder, G., Dellea, S., Rey, P., Berthelot, A., Longoni, A.
Investigation of the fatigue origin and propagation in submicrometric silicon piezoresistive layers
(2014) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
art. no. 6765722, pp. 640-643.

Caspani, A., Comi, C., Corigliano, A., Langfelder, G., Zega, V., Zerbini, S.
A differential resonant micro accelerometer for out-of-plane measurements
(2014) Procedia Engineering, 87, pp. 640-643.

Langfelder, G., Buffa, C., Minotti, P., Longoni, A., Tocchio, A., Zerbini, S.
Operation of Lorentz-force MEMS magnetometers with on-off current switching
(2014) European Solid-State Device Research Conference, art. no. 6948758, pp. 62-65.

Caspani, A., Errico, N., Giacci, F., Langfelder, G., Longoni, A., Koppinen, P.J., Saarilahti, J.
Emission profile of multi-membrane CMUT for in-air object localization
(2014) Procedia Engineering, 87, pp. 592-595.

Dellea, S., Laghi, G., Langfelder, G., Longoni, A., Minotti, P., Tocchio, A., Zerbini, S.
Off-resonance operation of in-plane torsional MEMS magnetometers
(2014) Procedia Engineering, 87, pp. 819-822.

Langfelder, G., Tocchio, A., Lasalandra, E., Longoni, A.
Comparison of Lorentz-force MEMS magnetometers based on different capacitive sensing topologies
(2013) Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors,
Actuators and Microsystems, pp. 709-712.

Caspani, A., Langfelder, G., Minotti, P., Longoni, A., Saarilahti, J.
Characterization and operation of different cMUT membranes in air
(2013) IEEE International Ultrasonics Symposium, IUS, art. no. 6724996, pp. 1720-1723.

Langfelder, G., Caspani, A., Tocchio, A., Zerbini, S., Longoni, A.
High-sensitivity differential fringe-field MEMS accelerometers
(2013) Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors,
Actuators and Microsystems, pp. 1823-1826.

Langfelder, G.
CMOS pixels directly sensitive to both visible and near-infrared radiation
(2013) IEEE Transactions on Electron Devices, 60 (5), pp. 1695-1700.

Langfelder, G., Tocchio, A.
MEMS integrating motion and displacement sensors
(2013) Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications,
pp. 366-401.

Caspani, A., Comi, C., Corigliano, A., Langfelder, G., Tocchio, A.
Compact biaxial micromachined resonant accelerometer
(2013) Journal of Micromechanics and Microengineering, 23 (10), art. no. 105012, .

Jaramillo, G., Buffa, C., Li, M., Brechtel, F.J., Langfelder, G., Horsley, D.A.
MEMS electrometer with femtoampere resolution for aerosol particulate measurements
(2013) IEEE Sensors Journal, 13 (8), art. no. 6523952, pp. 2993-3000.

Langfelder, G., Buffa, C., Longoni, A.F., Zaraga, F.
Spectrally tunable pixel sensors
(2013) Proceedings of SPIE - The International Society for Optical Engineering, 8660, art. no. 86600A, .

Frangi, A., De Masi, B., Langfelder, G., Paci, D.
Optimization of Lorentz-force MEMS magnetometers using rarefied-gas-theory
(2013) Proceedings of IEEE Sensors, art. no. 6688290, .

Langfelder, G., Buffa, C., Frangi, A., Tocchio, A., Lasalandra, E., Longoni, A.
Z-axis magnetometers for MEMS inertial measurement units using an industrial process
(2013) IEEE Transactions on Industrial Electronics, 60 (9), art. no. 6256722, pp. 3983-3990.

Martinez, M.A., Valero, E.M., Hernandez-Andres, J., Langfelder, G.
Spectral reflectance estimation from Transverse Field Detectors responses
(2012) 6th European Conference on Colour in Graphics, Imaging, and Vision 2012, CGIV 2012,
pp. 378-383.

Jaramillo, G., Horsley, D.A., Buffa, C., Langfelder, G.
A MEMS based electrometer with a low-noise switched reset amplifier for charge measurement
(2012) Proceedings of IEEE Sensors, art. no. 6411511, .

Buffa, C., Langfelder, G., Longoni, A., Frangi, A., Lasalandra, E.
Compact MEMS magnetometers for inertial measurement units
(2012) Proceedings of IEEE Sensors, art. no. 6411513, .

Tocchio, A., Caspani, A., Langfelder, G., Longoni, A., Lasalandra, E.
A pierce oscillator for MEMS resonant accelerometer with a novel low-power amplitude limiting
technique
(2012) 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings, art. no.
6243697, pp. 748-753.

Langfelder, G., Buffa, C., Tocchio, A., Frangi, A., Longoni, A., Lasalandra, E.
Design criteria for MEMS magnetometers resonating in free-molecule flow and out of the acoustic
bandwidth
(2012) 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings, art. no.
6243699, pp. 818-822.

Langfelder, G., Dellea, S., Zaraga, F., Cucchi, D., Azpeitia Urquia, M.
The dependence of fatigue in microelectromechanical systems on the environment and the industrial
packaging
(2012) IEEE Transactions on Industrial Electronics, 59 (12), art. no. 5764530, pp. 4938-4948.

Tocchio, A., Caspani, A., Langfelder, G.
Mechanical and electronic amplitude-limiting techniques in a MEMS resonant accelerometer
(2012) IEEE Sensors Journal, 12 (6), art. no. 6092432, pp. 1719-1725.

Langfelder, G., Buffa, C., Longoni, A.F., Pelamatti, A., Zaraga, F.
Active pixels of transverse field detector based on a charge preamplifier
(2012) Proceedings of SPIE - The International Society for Optical Engineering, 8299, art. no. 829906, .

Buffa, C., Tocchio, A., Langfelder, G.
A versatile instrument for the characterization of capacitive micro- and nanoelectromechanical
systems
(2012) IEEE Transactions on Instrumentation and Measurement, 61 (7), art. no. 6155088, pp. 2012-2021.

Langfelder, G.
Spectrally reconfigurable pixels for dual-color-mode imaging sensors
(2012) Applied Optics, 51 (4), pp. A91-A98.

Langfelder, G., Tocchio, A.
Differential fringe-field MEMS accelerometer
(2012) IEEE Transactions on Electron Devices, 59 (2), art. no. 6086606, pp. 485-490.

Tocchio, A., Caspani, A., Langfelder, G., Longoni, A., Lasalandra, E.
Resolution and start-up dynamics of MEMS resonant accelerometers
(2011) Proceedings of IEEE Sensors, art. no. 6127302, pp. 161-164.

Tocchio, A., Comi, C., Langfelder, G., Corigliano, A., Longoni, A.
Enhancing the linear range of MEMS resonators for sensing applications
(2011) IEEE Sensors Journal, 11 (12), art. no. 5871672, pp. 3202-3210.

Langfelder, G., Zaraga, F., Longoni, A., Buffa, C.
Adaptation to the scene in color imaging
(2011) IEEE Sensors Journal, 11 (9), art. no. 5685246, pp. 1979-1986.

Comi, C., Corigliano, A., Langfelder, G., Longoni, A., Tocchio, A.
On the nonlinear behaviour of MEMS resonators
(2011) 2011 12th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in
Microelectronics and Microsystems, EuroSimE 2011, art. no. 5765821, .

Langfelder, G., Frizzi, T., Longoni, A., Tocchio, A., Manelli, D., Lasalandra, E.
Readout of MEMS capacitive sensors beyond the condition of pull-in instability
(2011) Sensors and Actuators, A: Physical, 167 (2), pp. 374-384.

Comi, C., Corigliano, A., Langfelder, G., Longoni, A., Tocchio, A., Simoni, B.
A new biaxial silicon resonant micro accelerometer
(2011) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
art. no. 5734478, pp. 529-532.

Corigliano, A., Ghisi, A., Langfelder, G., Longoni, A., Zaraga, F., Merassi, A.
A microsystem for the fracture characterization of polysilicon at the micro-scale
(2011) European Journal of Mechanics, A/Solids, 30 (2), pp. 127-136.

Langfelder, G., Longoni, A.F., Zaraga, F.
Implementation of a multi-spectral color imaging device without color filter array
(2011) Proceedings of SPIE - The International Society for Optical Engineering, 7876, art. no. 787608.

Langfelder, G., Longoni, A.F., Tocchio, A., Lasalandra, E.
MEMS motion sensors based on the variations of the fringe capacitances
(2011) IEEE Sensors Journal, 11 (4), art. no. 5585668, pp. 1069-1077.

Langfelder, G., Malzbender, T., Longoni, A.F., Zaraga, F.
A device and an algorithm for the separation of visible and near infrared signals in a monolithic
Silicon sensor
(2011) Proceedings of SPIE - The International Society for Optical Engineering, 7882, art. no. 788207.

Langfelder, G., Buffa, C., Longoni, A., Zaraga, F.
High color accuracy image acquisition in single capture
(2011) Optics InfoBase Conference Papers, .

Corigliano, A., Domenella, L., Langfelder, G.
On-chip mechanical characterization using an electro-thermo-mechanical actuator
(2010) Proceedings of the Society for Experimental Mechanics, Inc., 67, pp. 695-707.

Langfelder, G., Buffa, C., Longoni, A., Zaraga, F.
Experimental characterization of a CMOS pixel with a tunable color space
(2010) Final Program and Proceedings - IS and T/SID Color Imaging Conference, pp. 166-171.

Langfelder, G., Buffa, C., Longoni, A., Zaraga, F.
Experimental characterization of a CMOS pixel with a tunable color space
(2010) CIC18 2010 - 18th Color and Imaging Conference: Color Science and Engineering Systems,
Technologies, and Applications, Technical Papers and Proceedings, pp. 166-171.
Langfelder, G., Tocchio, A., Thompson, M.J., Jaramillo, G., Horsley, D.A.
Assessing micromechanical sensor characteristics via optical and electrical metrology
(2010) Proceedings of IEEE Sensors, art. no. 5689961, pp. 1765-1769.

Comi, C., Corigliano, A., Langfelder, G., Longoni, A., Tocchio, A., Simoni, B.
A Resonant microaccelerometer with high sensitivity operating in an oscillating circuit
(2010) Journal of Microelectromechanical Systems, 19 (5), art. no. 5570853, pp. 1140-1152.

Zaraga, F., Langfelder, G., Longoni, A.
Implementation of an interleaved image sensor by means of the filterless transverse field detector
(2010) Journal of Electronic Imaging, 19 (3), art. no. 033013, .

Corigliano, A., Domenella, L., Langfelder, G.
On-chip mechanical characterization using an electro-thermo-mechanical actuator
(2010) Experimental Mechanics, 50 (6), pp. 695-707.

Comi, C., Corigliano, A., Langfelder, G., Longoni, A., Tocchio, A., Simoni, B.
A high sensitivity uniaxial resonant accelerometer
(2010) Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
art. no. 5442517, pp. 260-263.

Langfelder, G., Longoni, A., Zaraga, F.
Design and realization of a novel pixel sensor for color imaging applications in CMOS 90 nm technology
(2010) Lecture Notes in Electrical Engineering, 54 LNEE, pp. 143-146.

Langfelder, G.
Design of a fully CMOS compatible 3-μm size color pixel
(2010) Microelectronics Reliability, 50 (2), pp. 169-173.

Zaraga, F., Langfelder, G.
White balance by tunable spectral responsivities
(2010) Journal of the Optical Society of America A: Optics and Image Science, and Vision, 27 (1),
pp. 31-39.

Langfelder, G., Longoni, A., Zaraga, F.
Monitoring fatigue damage growth in polysilicon microstructures under different loading conditions
(2010) Sensors and Actuators, A: Physical, 159 (2), pp. 233-240.

Tocchio, A., Langfelder, G., Longoni, A., Lasalandra, E.
In-plane and out-of-plane MEMS motion sensors based on fringe capacitances
(2010) Procedia Engineering, 5, pp. 1392-1395.

Langfelder, G., Frizzi, T., Tocchio, A., Lasalandra, E., Longoni, A.
Modelling and testing of a MEMS accelerometer controlled and read-out beyond the pull-in instability
limit
(2010) Procedia Engineering, 5, pp. 1067-1070.

Langfelder, G., Longoni, A., Zaraga, F.
The Transverse Field Detector: A CMOS active pixel sensor capable of on-line tuning of the spectral
response
(2009) Proceedings of IEEE Sensors, art. no. 5398512, pp. 1652-1657.

Comi, C., Corigliano, A., Langfelder, G., Longoni, A., Tocchio, A., Simoni, B.
A new two-beam differential resonant micro accelerometer
(2009) Proceedings of IEEE Sensors, art. no. 5398209, pp. 158-163.

Langfelder, G., Longoni, A., Zaraga, F., Corigliano, A., Ghisi, A., Merassi, A.
Real-time monitoring of the fatigue damage accumulation in polysilicon microstructures at different
applied stresses
(2009) Proceedings of IEEE Sensors, art. no. 5398147, pp. 888-893.

Langfelder, G., Zaraga, F., Longoni, A.
White balance in a color imaging device with electrically tunable color filters
(2009) Proceedings of SPIE - The International Society for Optical Engineering, 7444, art. no. 744410, .

Langfelder, G., Longoni, A., Zaraga, F.
Further developments on a novel color sensitive CMOS detector
(2009) Proceedings of SPIE - The International Society for Optical Engineering, 7356, art. no. 73562A, .

Langfelder, G., Longoni, A., Zaraga, F.
A novel colour-sensitive CMOS detector
(2009) Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers,
Detectors and Associated Equipment, 610 (1), pp. 50-53.

Langfelder, G., Zaraga, F., Longoni, A.
Tunable spectral responses in a color-sensitive CMOS pixel for imaging applications
(2009) IEEE Transactions on Electron Devices, 56 (11), pp. 2563-2569.

Langfelder, G.
Isolation of highly doped implants on low-doped active layers for CMOS radiation drift detectors
(2009) IEEE Transactions on Electron Devices, 56 (8), pp. 1767-1773.

Langfelder, G., Longoni, A., Zaraga, F., Corigliano, A., Ghisi, A., Merassi, A.
A new on-chip test structure for real time fatigue analysis in polysilicon MEMS
(2009) Microelectronics Reliability, 49 (2), pp. 120-126.

Longoni, A., Zaraga, F., Langfelder, G., Bombelli, L.
The transverse field detector (TFD): A novel color-sensitive CMOS device
(2008) IEEE Electron Device Letters, 29 (12), pp. 1306-1308.

Langfelder, G., Longoni, A., Zaraga, F.
Low-noise real-time measurement of the position of movable structures in MEMS
(2008) Sensors and Actuators, A: Physical, 148 (2), pp. 401-406.

Langfelder, G., Longoni, A., Zaraga, F., Corigliano, A., Ghisi, A., Merassi, A.
A polysilicon test structure for fatigue and fracture testing in micro electro mechanical devices
(2008) Proceedings of IEEE Sensors, art. no. 4716391, pp. 94-97.




Books


G. Langfelder, A. Tocchio, 13 - MEMS integrating motion and displacement sensors,
 in Smart Sensors and Mems, edited by Stoyan Nihtianov and Antonio Luque,
Woodhead Publishing, 2014, Pages 366-401, ISBN 9780857095022.

Patents


G. Langfelder, A. Tocchio, D. Paci,
Sensore magnetico includente un trasduttore basato sulla forza di Lorentz pilotato ad una
frequenza diversa dalla frequenza di risonanza, e metodo di pilotaggio di un trasduttore basato
sulla forza di Lorentz, Italian patent number TO2013A000653.

F. Zaraga and G. Langfelder, Metodo per adattare un sistema di acquisizione d'immagine
ad una scena, italian patent n. IT MI2009A001990, November 12th 2009.

F. Zaraga and G. Langfelder, Photodetector and method for detecting an optical radiation,
international patent application n. WO2010/112400 A1, October 7th 2010.

A. Longoni, F. Zaraga and G. Langfelder, Luminous Radiation Colour Photosensitive Structure,
international patent application n. PCT/IB2007/003906, December 5th 2007, US patent application
n. US2009/0189056 A12, July 30th 2009

 
NEWS from the lab...
05-09-2022 two contributions from the lab accepted at the 2022 ICECS conference to be held next October in Glasgow! Congrats to Matteo Gianollo and all co-authors!

10-06-2022 good luck to Paolo Frigerio, who has just become an Assistant Professor with the DEIB department!

01-05-2022 we welcome Riccardo Nastri, who joined the laboratory as a PhD student!

08-05-2022 three contributions from the lab were presented at the 9th IEEE International Symposium on inertial sensors and systems: congratulations to all co-authors! Special cheers to A. Buffoli for the first runner-up award!

20-06-2021 best poster award granted to our presentation at the 2021 Transducers conference! Congratulations to Paolo Frigerio, Matteo Gianollo and all other co-authors!

01-05-2021 we welcome Christian Padovani and Andrea Buffoli, joining the lab with PhD focused on high performance inertial sensors!

24-09-2020 two contributions from the MEMS lab have been accepted for lecture presentation at IEEE Sensors 2020, to be held this October. Congrats to both Marco Gadola (M&NEMS gyroscopes) and Paolo Frigerio (MEMS-based RTCs) for their research!

08-09-2020 the first thesis student who started the M.S. Thesis during the lockdown is today on his first lab day! Welcome back to the MEMS laboratory, stay safe and take care!

01-08-2020 congratulations to G. Mussi and co-authors for disseminating a fantastic paper on integrated electronics for MEMS RTC! Look for the article "A MEMS Real-Time Clock with Single-Temperature Calibration and Deterministic Jitter Cancellation" on the IEEE website!

12-05-2020 congratulations to L. Gaffuri for disclosing the first scientific IEEE article on 3D-printed MEMS flow meters!

04-11-2019 the MEMS and Microsensors laboratory celebrates 13 years of education and research! What a sweet way to do so!


30-10-2019 here the link to Prof. Langfelder invited talk at IEEE Sensors 2019. Enjoy!

01-09-2019 congratulations to G. Mussi and co-authors for disseminating a brilliant article on MEMS real-time-clocks compensation vs temperature! Look for the TIE article "An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks" on the IEEE website!

20-08-2019 announcing the invited talk by Giacomo Langfelder at the upcoming IEEE Sensors conference 2019 in Montreal, Canada: "Frequency-modulated MEMS accelerometers for wide dynamic range and ultra-low consumption". Come join us in Quebec!

30-06-2019 Giacomo Langfelder presented an invited talk at the Transducers/Eurosensors 2019 Conference in Berlin, June 2019. The invited contribution title is "Frequency Modulated MEMS gyroscopes: recent developments , challenges and outlook". Check the upcoming proceedings on the IEEE website.

01-05-2019. Two presentations at the IEEE Inertial conference, three presentations at the IEEE MEMS conference, two presentations at the IFCS conference, and three presentations at Transducers... what a start for this 2019! Congratulations to all co-authors!

02-11-2018. A warm welcome to Paolo Frigerio and Leonardo Gaffuri, who have just started their PhD! Have three wonderful years of scientific research!

29-10-2018. A very complete article on the system-level development of frequency modulated gyroscopes has been accepted for publications in the IEEE Transactions on Industrial Electronics! Congratulations to all co-authors of "Fully Integrated, 406 ¼A, 5 æ/hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope"!